Sputtering Targets

Sputtering Targets

SAFINA offers silver sputtering target technology for flat glass production, memory media targets, decorative layer production targets, surface finishing tools, and more. Targets are made of precious metals and their alloys including silver (Ag), gold (Au), platinum (Pt), palladium (Pd), zinc (Zn), aluminum (Al), copper (Cu), titanium (Ti) and nickel-chromium (NiCr). We also offer a refilling service of already spent targets, which provides a cost saving.

Sputtering Targets

Industrial areas

  • Large area coatings and displays
  • Optical media industry
  • Decorative coatings
  • Hard coatings
  • Semiconductors
  • X-rays (rhodium discs)
  • Special purposes

Precious Metal Sputtering Target Purities

  • 99.999% and 99.99% gold (Au) sputtering targets
  • 99.99% silver (Ag) sputtering targets
  • 99.95% and 99.99% platinun (Pt) sputtering targets & palladium (Pd) sputtering targets
  • 99.9% and 99.95% rhodium (Rh) targets and discs
  • 99.9% and 99.95% iridium (Ir) targets and discs
  • 5N Au pellets, grain, shots, slugs and starter sources plus the following elements: Ag, Pt & Pd (4N & 3N5), Rh & Ir (3N5 &3N)
  • Specialty alloys also available

Rotatable and Planar Sputtering Targets and Discs

Planar Targets
State of the art processing equipment and technological expertise enables SAFINA to produce a wide variety of target designs and geometries. Master technicians with years of experience produce these targets with pride and precision.

Special enhanced designs for high utilization and targets for a variety of sputtering equipment may be supplied upon request.

Multi-Piece targets with profiled SST clamps offering WIP reduction and monolithic construction.

Targets for Large Area Coatings
The large area coatings industry is represented by multiple market sectors with numerous types of thin film coatings such as:

  • Architectural glass
  • Automotive glass
  • Displays
  • Photovoltaics
  • Solar thermal
  • Mirrors

SAFINA develops continuously its product range and services to be competitive and able to offer customized solutions for new applications. As one of leading suppliers, SAFINA offers multiple products for a large area coating applications, particularly for flat glass coatings. SAFINA’s R&D team focuses attention namely to the key production concerned with silver planar and silver rotatable targets (both cylindrical and dogbone) in various constructions and designs according to individual customers needs.

Targets for Decorative Coatings
We can offer many types of rotatable and planar sputtering targets as well as evaporation materials for decorative coatings. Applying the optimization of target geometry, high oxidation and wear resistence, superior uniformity and coating quality can be provided.

Rotatable Targets
Used extensively in large area coatings, provide longer life and more sputter-able mass due to its large rotating sputter surface area.

SAFINA pioneered the development of cold sprayed silver rotatable targets. The targets are now in use at leading edge large area coaters.

Silver (Ag) Rotatable Targets offer as low as 20 micron grain size, high density, up to 90% material utilization, <50 ppm O₂ content, 99.99% purity, target refill and respray capability, and design flexibility. Flame spray, arc spray, and cold gas spray technologies are offered.

Targets for Optical Media Industry
SAFINA manufactures wide variety of sputtering targets for optical discs, such as CD, CD-R, DVD±R, CR±RW, DVD±RW, and DVD9. Targets are produced based on the requested design and geometry keeping stable high quality and precision machining. As a reference, our products match with numerous types of metallizers made by Singulus, M2, Balzers, Tapematic, Anwell etc. Our recycling services for spent targets and precious metal scrap from masks complete the offer for our customers.

Target materials:

  • Silver targets – Ag 4N purity, monoblocks for CD-R and DVD±R
  • Silver alloy targets – targets for DVD9, non-standard alloys on request
  • Gold targets – Au 4N & 5N purity, in monoblocks or profiled bonded targets with higher utilization
  • Copper-aluminium – CuAl gold color material for gold discs
  • Nickel-chromium - NiCr20 cold spray rotatable targets for large area coatings

Targets for Semiconductor Industry
Semiconductor industry, one of the largest consumers of sputtering targets and evaporating materials, is another key market for SAFINA. We manufacture and supply high purity materials mainly from precious metals and their alloys for various sputtering and evaporation coating systems to our customers in semiconductor industry. Our quality is based on precise analysis in our laboratories to meet the high demands of the market.

Monoblock and bonded sputtering targets made of precious metals and their alloys:

Ag 4N, Au 4N, Au 5N, Pt 4N, Pd 3N5
Rhodium Targets and Discs
Rhodium targets and discs are available in various diameters and thicknesses according to customer specifications.  Applications include optical instruments, x-ray filter in mammography systems, and neutron detectors.  Rhodium targets and discs are available with metal purity of 99.9% or 99.95%.  

Iridium Targets and Discs

Iridium targets and discs are available in various diameters and thicknesses according to customer specifications.  Iridium targets are typically round or rectangular shaped.  Applications include x-ray optical coatings, oncological disease systems and semicoductor PVD coatings.  

Special Targets and Services
In order to satisfy individual needs together with sputtering targets manufactured by classic production techniques, SAFINA is able to offer special technologies for sputtering targets production, e.g. powder metallurgy for precious metal targets alloyed with refractory metals, spraying techniques, diverse types of bonding, manufacturing profiled targets with extreme high utilization, backing plate repairs, etc.

Analytical Equipment
GDMS, XRF, ICP-OES, AAS, metallographic grain size determination is used for analysis and certification.

Services
Technical support and analytical laboratory services are available.

SAFINA offers a full range of refining services including pool account and precious metal management programs.

Both metallic and nanofoil technology target bonding services are offered.

Precious metal refining services are offered to provide a full circle metal management system.

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